Functional Thin Films and Nanostructures for Sensors »

This book will discuss advances in the area of functional thin films for sensors and novel concepts for future breakthroughs. The focus will be on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Coverage of nanoscale thin films for sensors includes the following important topics: Fundamental physics of functional thin films and nanostructures; Synthesis processes of functional thin films; Integration of functional thin films; Applications of functional thin films in sensing.

1 Sensor Design Guidelines Anis Zribi 1

2 Transduction Principles Jeffrey Fortin 17

3 Growth and Synthesis of Nanostructured Thin Films Yiping Zhao 31

4 Integrated Micromachining Technologies for Transducer Fabrication Wei Cheng Tian 65

5 Applications of Functional Thin Films and Nanostructures in Gas Sensing Audrey Nelson 85

6 Chemical Sensors: New Ideas for the Nature Field Radislav A. Potyrailo 103

7 Applications of Functional Thin Films for Mechanical Sensing Chang Liu 145

8 Sensing Infrared and Terahertz Regions by Functional Films Magnus Willander Victor Ryzhii Qingxiang Zhao 167

Index 211